Development of ScAlN PMUTs for Medical Applications-Reference-Cited by-同舟云学术

Development of ScAlN PMUTs for Medical Applications

Published:2023-10 Issue:5 Volume:32 Page:505-512
ISSN:1057-7157
Container-title:Journal of Microelectromechanical Systems
language:
Short-container-title:J. Microelectromech. Syst.

Author:

Karuthedath Cyril Baby¹^ORCID,Sebastian Abhilash Thanniyil¹^ORCID,Helistö Panu¹^ORCID,Sillanpää Teuvo¹,Kärkkäinen Anu¹

Affiliation:

1. VTT Technical Research Centre of Finland Ltd., Espoo, Finland

Funder

ULIMPIA Project through PENTA

Okmetic Oy for providing Cavity Silicon on Insulator (CSOI) wafers in the Electronic Components and Systems for European Leadership (ESCEL) Project Position II

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Electrical and Electronic Engineering,Mechanical Engineering

Link

http://xplorestaging.ieee.org/ielx7/84/10269337/10197155.pdf?arnumber=10197155

Reference27 articles.

1. Monitoring of the central blood pressure waveform via a conformal ultrasonic device

2. Design, Fabrication, and Characterization of Scandium Aluminum Nitride-Based Piezoelectric Micromachined Ultrasonic Transducers

3. Piezoelectric Micromachined Ultrasonic Transducers With Pinned Boundary Structure

4. A noninvasive ultrasonic method for the elasticity evaluation of the carotid arteries and its application in the diagnosis of the cerebro-vascular system;powa?owski;Arch Acoust,1988

5. Matching Network-Boosted 36% Scaln Pmut Linear Array

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2. Electroacoustic Modeling of Patterned Piezoelectric Micromachined Ultrasonic Transducers;IEEE Sensors Journal;2024-06-15

3. Thin-Film Piezoelectric Micromachined Ultrasound Transducers in Biomedical Applications: A Review;IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control;2024-06

4. Demonstration of MHz piezoelectric micromachined ultrasonic transducers array and its potential application for biomedical treatment;Journal of Micromechanics and Microengineering;2024-02-15

5. Development of PMUT-Based High Sensitivity Gas Flow Sensor;Journal of Microelectromechanical Systems;2024-02