A Resonant High-Pressure Sensor Based on Six Cavities
Author:
Affiliation:
1. Aerospace Information Research Institute, Chinese Academy of Sciences,The State Key Laboratory of Transducer Technology,Beijing,CHINA
Funder
National Key R&D Program of China
NSFC
Publisher
IEEE
Link
http://xplorestaging.ieee.org/ielx7/9698823/9699435/09699441.pdf?arnumber=9699441
Reference10 articles.
1. Intelligent differential pressure transmitter using micro-resonators
2. A silicon resonant thermometer for high pressure and high temperature environment
3. The mechanism of field-assisted silicon-glass Bonding
4. A High Pressure Resonant Sensor;greenwood;Digest Tech Papers Heading Sensors for Sonar and Marine Applications,1994
5. Laterally vibrating MEMS resonant vacuum sensor based on cavity-SOI process for evaluation of wide range of sealed cavity pressure
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