Surface-Acoustic-Wave Devices Based on Lithium Niobate and Amorphous Silicon Thin Films on a Silicon Substrate
Author:
Affiliation:
1. Department of Electronic and Computing Engineering, Hong Kong University of Science and Technology, Clear Water Bay, Hong Kong
2. Department of Electrical and Computer Engineering, University of Illinois at Urbana-Champaign, Urbana, IL, USA
Funder
Hong Kong Research Grant Council—Early Career Scheme
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Subject
Electrical and Electronic Engineering,Condensed Matter Physics,Radiation
Link
http://xplorestaging.ieee.org/ielx7/22/9939120/09855831.pdf?arnumber=9855831
Reference50 articles.
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5. Effective resistivity of fully-processed SOI substrates
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