Evaluation of Lab-based Lithium Niobate Surface Acoustic Wave Test Structure Using Efficient Maskless Lithography and SMA Connection Approach for Microfluidic Applications-Reference-Cited by-同舟云学术

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Evaluation of Lab-based Lithium Niobate Surface Acoustic Wave Test Structure Using Efficient Maskless Lithography and SMA Connection Approach for Microfluidic Applications

Published:2024-04-15 Issue: Volume: Page:1-5
ISSN:
Container-title:2024 IEEE 36th International Conference on Microelectronic Test Structures (ICMTS)
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Author:

Parvez Mohammad Salman¹,Hussain Shadhin¹,Goeckner Matthew¹,Young Chadwin D.¹,Lee Jeong-Bong JB²

Affiliation:

1. The University of Texas at Dallas,Richardson,TX,USA,75080

2. Baylor University,Waco,TX

Publisher

IEEE

Link

http://xplorestaging.ieee.org/ielx7/10520250/10520251/10520693.pdf?arnumber=10520693

Reference12 articles.

1. Surface-Acoustic-Wave Devices Based on Lithium Niobate and Amorphous Silicon Thin Films on a Silicon Substrate

2. SAW Sensors for Chemical Vapors and Gases

3. Surface Acoustic Wave (SAW) Sensors: Physics, Materials, and Applications

4. Surface Acoustic Wave Microfluidics

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