1. Chair for Electron Devices and Integrated Circuits, Technische Universität Dresden, Dresden, Germany
2. Center for Advancing Electronics Dresden, Technische Universität Dresden, Dresden, Germany
3. Chair for Electron Devices and Integrated Circuits and the Center for Advancing Electronics Dresden, Technische Universität Dresden, Dresden, Germany
4. Center for Microtechnologies, Chemnitz University of Technology, Chemnitz, Germany