Non-destructive testing of through silicon vias by high-resolution X-ray/CT techniques
Author:
Publisher
IEEE
Link
http://xplorestaging.ieee.org/ielx7/6504698/6507037/06507139.pdf?arnumber=6507139
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3. High-resolution X-ray computed tomography of through silicon vias for RF MEMS integrated passive device applications;Microelectronics Reliability;2015-08
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