Research on temperature compensation method of silicon resonant accelerometer based on integrated temperature measurement resonator
Author:
Publisher
IEEE
Link
http://xplorestaging.ieee.org/ielx7/7489073/7494413/07494478.pdf?arnumber=7494478
Cited by 9 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
1. Temperature Drift Compensation of a MEMS Accelerometer Based on DLSTM and ISSA;Sensors;2023-02-06
2. Real-Time Temperature Drift Compensation Method of a MEMS Accelerometer Based on Deep GRU and Optimized Monarch Butterfly Algorithm;IEEE Access;2023
3. An Intrinsically Temperature-Drift Suppression Phase-Locked Loop With MEMS Voltage Controlled Oscillator for Micromechanical Resonant Accelerometer;Journal of Microelectromechanical Systems;2022-12
4. Temperature Compensation Method Based on an Improved Firefly Algorithm Optimized Backpropagation Neural Network for Micromachined Silicon Resonant Accelerometers;Micromachines;2022-06-30
5. Analysis of the Scale Factor Nonlinearity of MEMS Differential Silicon Resonant Accelerometer Caused by the DETF’s Force-Frequency Nonlinear Characteristic;IEEE Sensors Journal;2022-03-01
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