Isolation on Si wafers by MeV proton bombardment for RF integrated circuits-Reference-Cited by-同舟云学术

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Isolation on Si wafers by MeV proton bombardment for RF integrated circuits

Published:2001-05 Issue:5 Volume:48 Page:928-934
ISSN:0018-9383
Container-title:IEEE Transactions on Electron Devices
language:
Short-container-title:IEEE Trans. Electron Devices

Author:

Lurng Shehng Lee ,Chungpin Liao ,Chung-Len Lee ,Tzuen-His Huang ,Denny Duan-Lee Tang ,Ting Shien Duh ,Tsing-Tyan Yang

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Electrical and Electronic Engineering,Electronic, Optical and Magnetic Materials

Link

http://xplorestaging.ieee.org/ielx5/16/19852/00918241.pdf?arnumber=918241

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