1. Center for Microtechnologies, Chemnitz University of Technology, D-09107, Germany
2. Department of Inorganic Chemistry, Chemnitz University of Technology, D-09107, Germany
3. Department of Semiconductor Physics, Chemnitz University of Technology, D-09107, Germany
4. Fraunhofer Center Nanoelectronic Technologies (CNT), D-01099 Dresden, Germany
5. State Key Laboratory of ASIC and System, Department of Microelectronics, Fudan - University, Shanghai 200433, China