Low Driving Voltage and Low Optical Loss Electro-Optic Modulators Based on Lead Zirconate Titanate Thin Film on Silicon Substrate
Author:
Affiliation:
1. Department of Materials Science, Fudan University, Shanghai, China
2. Key Laboratory of 3D Micro/Nano Fabrication and Characterization of Zhejiang Province, School of Engineering, Westlake University, Hangzhou, China
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Subject
Atomic and Molecular Physics, and Optics
Link
http://xplorestaging.ieee.org/ielx7/50/9763567/09701662.pdf?arnumber=9701662
Reference39 articles.
1. Nanophotonic Pockels modulators on a silicon nitride platform
2. Photonic integration based on a ferroelectric thin-film platform
3. Lanthanide-Assisted Deposition of Strongly Electro-optic PZT Thin Films on Silicon: Toward Integrated Active Nanophotonic Devices
4. An ultralow power athermal silicon modulator
5. A BaTiO3-Based Electro-Optic Pockels Modulator Monolithically Integrated on an Advanced Silicon Photonics Platform
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1. Sputter-deposited PZT on patterned silicon optimization for C-band electro-optic modulation;Journal of the Optical Society of America B;2023-08-15
2. High frequency characterization of PZT thin-films deposited by chemical solution deposition on SOI for integrated high speed electro-optic modulators;Optical Materials Express;2023-06-29
3. Nonlinear Optical Properties in Perovskite Structure and Their Applications;Metal-Halide Perovskite Semiconductors;2023
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