Lanthanide-Assisted Deposition of Strongly Electro-optic PZT Thin Films on Silicon: Toward Integrated Active Nanophotonic Devices

Author:

George J. P.123,Smet P. F.43,Botterman J.43,Bliznuk V.5,Woestenborghs W.13,Van Thourhout D.23,Neyts K.13,Beeckman J.13

Affiliation:

1. Department of Electronics and Information Systems, Ghent University, Sint-Pietersnieuwstraat 41, 9000 Gent, Belgium

2. Department of Information Technology, Ghent University, Sint-Pietersnieuwstraat 41, 9000 Gent, Belgium

3. Center for Nano- and Biophotonics (NB-Photonics), Ghent University, 9000 Gent, Belgium

4. LumiLab, Department of Solid State Sciences, Ghent University, Krijgslaan 281-S1, 9000 Gent, Belgium

5. Department of Materials Science and Engineering, Ghent University, Technologiepark 903, B-9052 Zwijnaarde, Belgium

Funder

Federaal Wetenschapsbeleid

Publisher

American Chemical Society (ACS)

Subject

General Materials Science

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