Deposition of Parylene C and characterization of its hermeticity for the encapsulation of MEMS and medical devices-Reference-Cited by-同舟云学术

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Deposition of Parylene C and characterization of its hermeticity for the encapsulation of MEMS and medical devices

Published:2016-04 Issue: Volume: Page:
ISSN:
Container-title:2016 IEEE 11th Annual International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)
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Author:

Selbmann Franz¹,Baum Mario¹,Wiemer Maik¹,Gessner Thomas¹

Affiliation:

1. Fraunhofer-Institute for Electronic Nano Systems ENAS, Department System Packaging, Technologie-Campus 3, 09126 Chemnitz, Germany

Publisher

IEEE

Link

http://xplorestaging.ieee.org/ielx7/7750493/7758182/07758283.pdf?arnumber=7758283

Cited by 14 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Identification of Effects of Parylene-C Coating on Electrospun Fibers;Fibers;2024-08-22

2. Hot Embossing to Fabricate Parylene-Based Microstructures and Its Impact on the Material Properties;Polymers;2024-08-03

3. Development of a Water Transmission Rate (WTR) Measurement System for Implantable Barrier Coatings;Polymers;2023-06-01

4. Paradigm Changing Integration Technology for the Production of Flexible Electronics by Transferring Structures, Dies and Electrical Components from Rigid to Flexible Substrates;Micromachines;2023-02-10

5. Impact of Non-Accelerated Aging on the Properties of Parylene C;Polymers;2022-12-01

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