Preparation of undoped and doped microcrystalline silicon (μc-Si:H) by VHF-GD for p-i-n solar cells
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Publisher
IEEE
Link
http://xplorestaging.ieee.org/ielx2/1061/8044/00347112.pdf?arnumber=347112
Cited by 6 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
1. Microcrystalline silicon thin films deposited by matrix-distributed electron cyclotron resonance plasma enhanced chemical vapor deposition using an SiF4 /H2chemistry;Journal of Physics D: Applied Physics;2016-06-21
2. Flexible Protocrystalline Silicon Solar Cells with Amorphous Buffer Layer;Japanese Journal of Applied Physics;2006-09-07
3. Transport and electrically detected electron spin resonance of microcrystalline silicon before and after electron irradiation;Physical Review B;2002-04-08
4. Mobility gap profiles in Si:H intrinsic layers prepared by H2-dilution of SiH4: effects on the performance of p–i–n solar cells;Journal of Non-Crystalline Solids;2002-04
5. Preparation of High-Quality Undoped Microcrystalline Silicon with High Deposition Rate Using Mercury-Sensitized Photochemical Vapor Deposition Method;Japanese Journal of Applied Physics;1996-11-15
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