LSI processing technology for planar GaAs integrated circuits

Author:

Welch B.M.,Yie-Der Shen ,Zucca R.,Eden R.C.,Long S.I.

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Electrical and Electronic Engineering,Electronic, Optical and Magnetic Materials

Cited by 76 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献

1. Recovery and accumulation of ion irradiation damage leading to dose rate dependence in GaAs;Japanese Journal of Applied Physics;2020-08-27

2. Piezoelectrically-active defects and their impact on the performance of GaAs MESFETs;Journal of Materials Processing Technology;1995-12

3. Patterned, photon-driven cryoetching of GaAs and AlGaAs;Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures;1995-01

4. Computer simulation of Si‐implanted GaAs (001) single crystals;Journal of Applied Physics;1992-07

5. Trap effects in p-channel GaAs MESFET's;IEEE Transactions on Electron Devices;1992

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