Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Subject
Electrical and Electronic Engineering,Electronic, Optical and Magnetic Materials
Cited by
5 articles.
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1. Applications;Polycrystalline Silicon for Integrated Circuits and Displays;1998
2. Raman scattering in polycrystalline silicon doped with boron;Journal of Applied Physics;1992-10-15
3. Junction Formation and Poly‐Si Doping for Scaled Sub‐Micron CMOS Technology;Journal of The Electrochemical Society;1992-08-01
4. On the effect of non-degenerate doping of polysilicon gate in thin oxide MOS-devices—Analytical modeling;Solid-State Electronics;1990-12
5. Applications;Polycrystalline Silicon for Integrated Circuit Applications;1988