Author:
Lamure J.M.,Biasse B.,Jaussaud C.,Papon A.M.,Michaud J.F.,Gusella F.,Pudda C.,Cartier A.M.,Soubie A.,Margail J.
Cited by
8 articles.
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1. Chapter 2 A review of buried oxide structures and SOI technologies;New Insulators, Devices and Radiation Effects;1999
2. Structural defects in SIMOX;Ion Beam Processing of Materials and Deposition Processes of Protective Coatings;1996
3. Buried oxides: where we have been and where we are going;Journal of Non-Crystalline Solids;1995-07
4. A study of the growth and shrinkage of stacking faults in SIMOX;Materials Science and Engineering: B;1995-01
5. Novel Approach to Defect Etching in Thin Film Silicon‐on‐Insulator;Journal of The Electrochemical Society;1993-06-01