Electrical Modeling and Analysis of Differential Dielectric-Cavity Through-Silicon via Array

Author:

Liu Xiaoxian,Zhu ZhangmingORCID,Yang Yintang,Ding Ruixue,Li Yuejin

Funder

National Natural Science Foundation of China

Opening Project of Science and Technology on Reliability Physics and Application Technology of Electronic Component Laboratory

Shaanxi S & T co-ordinate innovation project

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Electrical and Electronic Engineering,Condensed Matter Physics

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