Improved design of a silicon micromachined gyroscope with piezoresistive detection and electromagnetic excitation-Reference-Cited by-同舟云学术

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Improved design of a silicon micromachined gyroscope with piezoresistive detection and electromagnetic excitation

Published:1999 Issue:3 Volume:8 Page:243-250
ISSN:1057-7157
Container-title:Journal of Microelectromechanical Systems
language:
Short-container-title:J. Microelectromech. Syst.

Author:

Gretillat F.,Gretillat M.-A.,de Rooij N.F.

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Electrical and Electronic Engineering,Mechanical Engineering

Link

http://xplorestaging.ieee.org/ielx5/84/17086/00788627.pdf?arnumber=788627

Cited by 31 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Numerical simulation of the piezoresistive effect of βGa2O3 in the <010> direction;Japanese Journal of Applied Physics;2021-03-08

2. Dynamical analysis of an improved MEMS ring gyroscope encircled by piezoelectric film;International Journal of Mechanical Sciences;2020-12

3. Nonlinear Performance of MEMS Vibratory Ring Gyroscope;Acta Mechanica Solida Sinica;2020-11-24

4. MEMS triaxial gyroscope using surface and sidewall doping piezoresistors;Journal of Micromechanics and Microengineering;2020-07-21

5. A review on actuation and sensing techniques for MEMS-based microgrippers;Journal of Micro-Bio Robotics;2017-05-30

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