Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Subject
Electrical and Electronic Engineering,Computer Graphics and Computer-Aided Design,Software
Cited by
18 articles.
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1. 3D TCAD at TU Vienna;3-Dimensional Process Simulation;1995
2. Process modeling;Microelectronic Engineering;1989-05
3. Silicon Phases;Physical Chemistry of, in and on Silicon;1989
4. Electrical activation of boron-implanted silicon during rapid thermal annealing;Applied Physics A: Solids and Surface;1988-12
5. Dose effects in ion implanted compound semiconductors;Applied Physics A: Solids and Surface;1988-08