Author:
Ma Yuzhe,Gao Jhih-Rong,Kuang Jian,Miao Jin,Yu Bei
Cited by
27 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Model-based OPC Extension in OpenILT;2024 2nd International Symposium of Electronics Design Automation (ISEDA);2024-05-10
2. SwinT-ILT: Swin Transformer embedding end-to-end mask optimization model;Journal of Micro/Nanopatterning, Materials, and Metrology;2024-01-30
3. DevelSet: Deep Neural Level Set for Instant Mask Optimization;IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems;2023-12
4. OpenILT: An Open Source Inverse Lithography Technique Framework (Invited Paper);2023 IEEE 15th International Conference on ASIC (ASICON);2023-10-24
5. CTM-SRAF: Continuous Transmission Mask-Based Constraint-Aware Subresolution Assist Feature Generation;IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems;2023-10