AlGaN/GaN HEMT Based pH Detection Using Atomic Layer Deposition of Al<sub>2</sub>O<sub>3</sub> as Sensing Membrane and Passivation-Reference-Cited by-同舟云学术

AlGaN/GaN HEMT Based pH Detection Using Atomic Layer Deposition of Al₂O₃ as Sensing Membrane and Passivation

Author:

Bhat Aasif Mohammad¹^ORCID,Periasamy C.²^ORCID,Poonia Ritu¹^ORCID,Varghese Arathy³^ORCID,Shafi Nawaz⁴^ORCID,Tripathy Sudhiranjan⁵^ORCID

Affiliation:

1. Department of Electronics and Communication Engineering, Malaviya National Institute of Technology, Jaipur, India

2. Department of Electronics and Communication Engineering, National Institute of Technology Calicut, Kerala, India

3. School of Engineering, Cardiff University, Cardiff, U.K.

4. School of Electronics Engineering, Vellore Institute of Technology, Vellore, India

5. Institute of Materials Research and Engineering, A*STAR (Agency for Science, Technology, and Research), Singapore, Singapore

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Electrical and Electronic Engineering,Computer Science Applications

Link

Reference33 articles.

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