$\hbox{ZrLaO}_{x}\hbox{/ZrTiO}_{x}\hbox{/ZrLaO}_{x}$ Laminate as Insulator for MIM Capacitors With High Capacitance Density and Low Quadratic Voltage Coefficient Using Canceling Effect-Reference-Cited by-同舟云学术

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$\hbox{ZrLaO}_{x}\hbox{/ZrTiO}_{x}\hbox{/ZrLaO}_{x}$ Laminate as Insulator for MIM Capacitors With High Capacitance Density and Low Quadratic Voltage Coefficient Using Canceling Effect

Published:2012-10 Issue:10 Volume:33 Page:1447-1449
ISSN:0741-3106
Container-title:IEEE Electron Device Letters
language:
Short-container-title:IEEE Electron Device Lett.

Author:

Chen Lun Lun,Wu Yung-Hsien,Lin Yu-Bo,Lin Chia-Chun,Wu Min-Lin

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Electrical and Electronic Engineering,Electronic, Optical and Magnetic Materials

Link

http://xplorestaging.ieee.org/ielx5/55/6310089/06289340.pdf?arnumber=6289340

Cited by 9 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Improvement of Voltage Linearity and Leakage Current of MIM Capacitors With Atomic Layer Deposited Ti-Doped ZrO₂ Insulators;IEEE Transactions on Electron Devices;2023-06

2. Improved interface quality of atomic-layer-deposited ZrO2 metal-insulator-metal capacitors with Ru bottom electrodes;Thin Solid Films;2020-05

3. Review—Beyond the Highs and Lows: A Perspective on the Future of Dielectrics Research for Nanoelectronic Devices;ECS Journal of Solid State Science and Technology;2019

4. Nanostructured Anodic Al2O3/TiO2/Al2O3 Metal–Insulator–Metal Capacitors;Journal of Nanoelectronics and Optoelectronics;2017-07-01

5. Nanostructured Anodic Multilayer Dielectric Stacked Metal-Insulator-Metal Capacitors;Journal of Nanoscience and Nanotechnology;2015-12-01

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