Investigation of the Impact of Ferroelectricity Boosted Gate Stacks for 3D NAND on Short Time Data Retention and Endurance
Author:
Higashi Y.1,
Bastos J. P.1,
Chasin A.1,
Breuil L.1,
Arreghini A.1,
Ramesh S.1,
Rachidi S.1,
Jeong Y.1,
Van den bosch G.1,
Rosmeulen M.1