Combining SILC and BD statistics for low-voltage lifetime projection in HK/MG stacks

Author:

Vici Andrea1,Degraeve Robin2,Bastos Joao Pedro2,Roussel Philippe2,De Wolf Ingrid2

Affiliation:

1. KU Leuven,ESAT,Leuven,Belgium

2. imec,Leuven,Belgium

Publisher

IEEE

Cited by 4 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献

1. Physics-informed machine learning to analyze oxide defect-induced RTN in gate leakage current;2024 IEEE International Reliability Physics Symposium (IRPS);2024-04-14

2. Analysis of TDDB lifetime projection in low thermal budget HfO2/SiO2 stacks for sequential 3D integrations;2023 IEEE International Reliability Physics Symposium (IRPS);2023-03

3. Using dedicated device arrays for the characterization of TDDB in a scaled HK/MG technology;2023 IEEE International Reliability Physics Symposium (IRPS);2023-03

4. Dedicated ICs for the Characterization of Variability and Aging Studies and their Use in Lightweight Security Applications : Invited paper;2022 IEEE Latin American Electron Devices Conference (LAEDC);2022-07-04

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