Affiliation:
1. State Key Laboratory of Fabrication Technologies for Integrated Circuits, Institute of Microelectronics of Chinese Academy of Sciences, Beijing, China
Funder
National Key Research and Development Program of China
Chinese Academy of Sciences Key Deployment Research Program
National Natural Science Foundation of China
Strategic Priority Research Program of Chinese Academy of Sciences
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Cited by
1 articles.
订阅此论文施引文献
订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献