Hybrid Reluctance Actuator to Compensate for Parasitic Force for Nanopositioning
Author:
Affiliation:
1. University of Fukui, 3-9-1,Department of Mechanical Engineering,Bunkyo, Fukui,Japan,910-8507
2. University of Fukui, 3-9-1,Graduate School of Engineering,Bunkyo, Fukui,Japan,910-8507
Publisher
IEEE
Link
http://xplorestaging.ieee.org/ielx8/10636941/10636942/10637043.pdf?arnumber=10637043
Reference22 articles.
1. Atomic Force Microscopy
2. Design and Control of a Dual-Probe Atomic Force Microscope
3. Instrument for tensile testing of individual collagen fibrils with facile sample coupling and uncoupling
4. Invited Review Article: High-speed flexure-guided nanopositioning: Mechanical design and control issues
5. High-speed atomic force microscopy and its future prospects
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