Velocity distributions in magnetron sputter-Reference-Cited by-同舟云学术

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Velocity distributions in magnetron sputter

Published:1998 Issue:6 Volume:26 Page:1635-1644
ISSN:0093-3813
Container-title:IEEE Transactions on Plasma Science
language:
Short-container-title:IEEE Trans. Plasma Sci.

Author:

Shon C.H.,Lee J.K.,Lee H.J.,Yang Y.,Chung T.H.

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Condensed Matter Physics,Nuclear and High Energy Physics

Link

http://xplorestaging.ieee.org/ielx4/27/16145/00747881.pdf?arnumber=747881

Cited by 37 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Empirically extending 1D Child–Langmuir theory to a finite temperature beam;Physics of Plasmas;2024-08-01

2. Study of Plasma Particle Distribution and Electron Temperature in Cylindrical Magnetron Sputtering;Plasma Chemistry and Plasma Processing;2023-11-17

3. Particle-in-Cell Simulations for the Improvement of the Target Erosion Uniformity by the Permanent Magnet Configuration of DC Magnetron Sputtering Systems;Coatings;2023-04-07

4. Zeeman-resolved TDLAS using metastable levels of Ar in the weakly magnetized plasma of the linear plasma device PSI-2;Journal of Physics D: Applied Physics;2021-07-14

5. Magnetron sputtering: determining scaling relations towards real power discharges using 3D particle-in-cell Monte Carlo models;Plasma Sources Science and Technology;2020-11-01

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