Inductive plasma sources for plasma implantation and deposition-Reference-Cited by-同舟云学术

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Inductive plasma sources for plasma implantation and deposition

Published:1998 Issue:6 Volume:26 Page:1653-1660
ISSN:0093-3813
Container-title:IEEE Transactions on Plasma Science
language:
Short-container-title:IEEE Trans. Plasma Sci.

Author:

Tuszewski M.,Henins I.,Nastasi M.,Scarborough W.K.,Walter K.C.,Lee D.H.

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Condensed Matter Physics,Nuclear and High Energy Physics

Link

http://xplorestaging.ieee.org/ielx4/27/16145/00747883.pdf?arnumber=747883

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