Funder
National Research Foundation of Korea (NRF) of Ministry of Science and ICT
World Class 300 Research and Development Project of MSS
BK21 Plus Program
NRF
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Subject
Electrical and Electronic Engineering,Industrial and Manufacturing Engineering,Condensed Matter Physics,Electronic, Optical and Magnetic Materials
Cited by
7 articles.
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1. RETRACTED: MSFGQ: Design of an efficient Multiparametric model for improving sub-field scheduling performance via novel GA & Q-Learning optimizations;Journal of Intelligent & Fuzzy Systems;2024-05-04
2. LayouTransformer;Proceedings of the 41st IEEE/ACM International Conference on Computer-Aided Design;2022-10-30
3. DeePattern: Layout Pattern Generation With Transforming Convolutional Auto-Encoder;IEEE Transactions on Semiconductor Manufacturing;2022-02
4. A Survey on Machine Learning in Lithography;2021 International Conference on Artificial Intelligence and Machine Vision (AIMV);2021-09-24
5. Data augmentation in hotspot detection based on generative adversarial network;Journal of Micro/Nanopatterning, Materials, and Metrology;2021-07-15