Wafer Lot Assignment for Parallel-Producing Tools Based on Heuristic Clustering Algorithm
Author:
Affiliation:
1. Department of Automation, Tsinghua University, Beijing, China
2. Department of Research Center, Semiconductor Technology Innovation Center (Beijing) Corporation, Beijing, China
Funder
National Science and Technology Innovation 2030 Major Project through the Ministry of Science and Technology of China
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Subject
Electrical and Electronic Engineering,Industrial and Manufacturing Engineering,Condensed Matter Physics,Electronic, Optical and Magnetic Materials
Link
http://xplorestaging.ieee.org/ielx7/66/9768876/09759338.pdf?arnumber=9759338
Reference38 articles.
1. Multi-objective flexible job-shop scheduling problem using modified discrete particle swarm optimization
2. Pearson's correlation coefficient
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4. Clustering structure analysis in time-series data with density-based clusterability measure
5. A weight-incorporated similarity-based clustering ensemble method based on swarm intelligence
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