Intelligent Optimization of Dosing Uniformity in Ion Implantation Systems-Reference-Cited by-同舟云学术

登录注册会员服务联系我们

Intelligent Optimization of Dosing Uniformity in Ion Implantation Systems

Published:2022-08 Issue:3 Volume:35 Page:580-584
ISSN:0894-6507
Container-title:IEEE Transactions on Semiconductor Manufacturing
language:
Short-container-title:IEEE Trans. Semicond. Manufact.

Author:

Lang Christopher I.¹^ORCID,Sprenkle Rick²,Wilson Eric²,Samolov Ana²,Boning Duane S.³^ORCID

Affiliation:

1. Microsystems Technology Laboratories, Massachusetts Institute of Technology, Cambridge, MA, USA

2. Applied Materials Inc, Gloucester, MA, USA

3. Department of Electrical Engineering and Computer Science, Massachusetts Institute of Technology, Cambridge, MA, USA

Funder

Applied Materials Inc

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Electrical and Electronic Engineering,Industrial and Manufacturing Engineering,Condensed Matter Physics,Electronic, Optical and Magnetic Materials

Link

http://xplorestaging.ieee.org/ielx7/66/9851188/09781608.pdf?arnumber=9781608

Reference19 articles.

1. Machine learning-based optimization of dose uniformity for ion implantation systems;lang;Proc AEC/APC Symp Asia,2021

2. A tutorial on Bayesian optimization;frazier;arXiv1807 02811,2018

3. Modeling and Optimizing the Impact of Process and Equipment Parameters in Sputtering Deposition Systems Using a Gaussian Process Machine Learning Framework

4. Understanding and Improving Virtual Metrology Systems Using Bayesian Methods

5. Process Performance Prediction for Chemical Mechanical Planarization (CMP) by Integration of Nonlinear Bayesian Analysis and Statistical Modeling

Cited by 1 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Materials Modifications by Radiation Technology;Handbook on Radiation Environment, Volume 1;2024

同舟云学术

1.学者识别学者识别

2.学术分析学术分析

3.人才评估人才评估

"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370

www.globalauthorid.com

TOP

Copyright © 2019-2024 北京同舟云网络信息技术有限公司
京公网安备11010802033243号京ICP备18003416号-3