Author:
Ohta K.,Yamada K.,Saitoh M.,Shimizu K.,Tarui Y.
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Subject
Electrical and Electronic Engineering
Cited by
2 articles.
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1. Silicon Nitride as Mask and Dielectric in Field Effect Devices;Si Silicon;1991
2. Physics of Submicron Devices;Large Scale Integrated Circuits Technology: State of the Art and Prospects;1982