Author:
Lee J.Y.,Kubena R.L.,Hagen G.
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Subject
Electrical and Electronic Engineering,Electronic, Optical and Magnetic Materials
Cited by
2 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Microfabrication;Fabrication and Design of Resonant Microdevices;2009
2. A new ultrafine groove fabrication method utilizing electron cyclotron resonance plasma deposition and reactive ion etching;Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures;1988-03