1. Fundamentals of microfabrication: the science of miniaturization;Madou,2002
2. The science and engineering of microelectronic fabrication;Campbell,2001
3. Semiconductor materials and process technology handbook,1988
4. Fundamentals of semiconductor fabrication;May,2004
5. “Surface topography evolution and fatigue fracture in polysilicon MEMS structures”;Allameh;IEEE Journal of Microelectromechanical Systems,2003