The IMGC calibration setup for microdisplacement actuators
Author:
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Subject
Electrical and Electronic Engineering,Instrumentation
Link
http://xplorestaging.ieee.org/ielx5/19/16684/00769635.pdf?arnumber=769635
Cited by 14 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. The Calibration of Displacement Sensors;Sensors;2020-01-21
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4. Nanometer positioning accuracy over a long term traveling stage based on heterodyne interferometry;International Journal of Metrology and Quality Engineering;2012
5. The Alternating Direction Iterative of Axial Symmetric Electrostatic Field without Charge Current Distribution;Advances in Computer Science, Intelligent System and Environment;2011
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