Thickness shear mode epitaxial (10–12) LiNbO3 (11–20) AZO/(10–12) Al2O3 BAW resonator
Author:
Affiliation:
1. Waseda University,Tokyo,Japan
Publisher
IEEE
Link
http://xplorestaging.ieee.org/ielx7/9855196/9855199/09855262.pdf?arnumber=9855262
Reference14 articles.
1. Electromechanical coupling and gigahertz elastic properties of ScAlN films near phase boundary
2. Effects of Interfacial Energy on the Epitaxial Growth of LiNbO3.
3. Preparation of Lithium Niobate Thin Film by Thermal Chemical Vapor Deposition
4. Growth and Photorefractive Properties of Stoichiometric LiNbO3 and LiTaO3;hatano;Photorefractive Materials and Their Applications 2 Springer Series in Optical Sciences,1974
5. Shear-mode electromechanical coupling coefficient k15 and crystallites alignment of (11–20) textured ZnO films;yanagitani;J A ppl Phys,2007
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