Fabrication of Micro/nanostructures on Silicon using a Mixed Multiple Pulses Femtosecond Laser-Reference-Cited by-同舟云学术

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Fabrication of Micro/nanostructures on Silicon using a Mixed Multiple Pulses Femtosecond Laser

Published:2022-07-04 Issue: Volume: Page:
ISSN:
Container-title:2022 IEEE 22nd International Conference on Nanotechnology (NANO)
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Author:

Luo Hao¹,Yu Haibo¹,Wen Yangdong²,Li Shendi¹,Wang Xiaoduo¹,Qiu Ye¹,Liu Lianqing¹

Affiliation:

1. State Key Laboratory of Robotics, Shenyang Institute of Automation, the Institutes for Robotics and Intelligent Manufacturing, Chinese Academy of Sciences,Shenyang,China,110016

2. Institute of Urban Rail Transportation, Southwest Jiaotong University,Chengdu,China,610000

Funder

National Key R&D Program of China

National Natural Science Foundation of China

Publisher

IEEE

Link

http://xplorestaging.ieee.org/ielx7/9928528/9928587/09928651.pdf?arnumber=9928651

Reference14 articles.

1. Optics at critical intensity: Applications to nanomorphing

2. On the generation of grooves on crystalline silicon irradiated by femtosecond laser pulses

3. Single-pulse femtosecond laser ablation of monocrystalline silicon: A modeling and experimental study

4. Formation of ordered nano- and mesostructures in silicon irradiated with a single femtosecond laser pulse in different environments

5. Evidencing the nonlinearity independence of resolution in femtosecond laser ablation

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