Single-pulse femtosecond laser ablation of monocrystalline silicon: A modeling and experimental study-Reference-Cited by-同舟云学术

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Single-pulse femtosecond laser ablation of monocrystalline silicon: A modeling and experimental study

Published:2022-02 Issue: Volume:576 Page:151722
ISSN:0169-4332
Container-title:Applied Surface Science
language:en
Short-container-title:Applied Surface Science

Author:

Chen Chong,Zhang Fan,Zhang Yang,Xiong Xin,Ju Bing-Feng,Cui Hailong,Chen Yuan-Liu

Publisher

Elsevier BV

Subject

Surfaces, Coatings and Films,Condensed Matter Physics,Surfaces and Interfaces,General Physics and Astronomy,General Chemistry

Reference37 articles.

1. On-machine and in-process surface metrology for precision manufacturing;Gao;CIRP Ann.,2019

2. Surface patterning on insulators upon femtosecond laser ablation;Costache;Appl. Surf. Sci.,2003

3. Annealing recovery of nanoscale silicon surface damage caused by Ga focused ion beam;Xiao;Appl. Surf. Sci.,2015

4. Gas-assisted focused electron beam and ion beam processing and fabrication;Utke;J. Vacuum Sci. Technol. B: Microelectron. Nanometer Struct. Process., Measurement Phenomena,2008

5. Temperature profile and crater formation induced in high-current pulsed electron beam processing;Qin;J. Vacuum Sci. Technol. A: Vacuum Surfaces Films,2003

Cited by 25 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Nanosecond laser induced periodic silicon microstructures for broadband antireflective applications;Optics & Laser Technology;2024-12

2. The picosecond laser ablation mechanism of monocrystalline silicon by coupling two-temperature model (TTM)-Molecular dynamic (MD);Applied Surface Science;2024-07

3. Femtosecond laser-induced dewetting of sub-10-nm nanostructures on silicon in ambient air;APL Photonics;2024-07-01

4. Experimental and Simulation Research on Femtosecond Laser Induced Controllable Morphology of Monocrystalline SiC;Micromachines;2024-04-26

5. Modifying single-crystal silicon and trimming silicon microring devices by femtosecond laser irradiation;Optics Express;2024-04-18

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