Author:
Bersani M.,Lazzeri P.,Giubertoni D.,Barozzi M.,Marchi E.B.,Anderle M.
Cited by
2 articles.
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1. Experience of accreditation in a surface science laboratory;Accreditation and Quality Assurance;2015-09-26
2. Influence of co-implantation on the activation and diffusion of ultra-shallow extension implantation;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2005-08