Author:
Winston S.H.,Gwilliam R.M.,Sealy B.J.,Boudreault G.,Jeynes C.,Webb R.P.,Kirkby K.J.
Cited by
1 articles.
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1. Comparison of elemental boron and boron halide implants into silicon;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2005-08