Assembly of Piezoelectric MEMS Vibration Sensor for Cochlear Implant-Reference-Cited by-同舟云学术

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Assembly of Piezoelectric MEMS Vibration Sensor for Cochlear Implant

Published:2023-08-28 Issue: Volume: Page:
ISSN:
Container-title:2023 37th Symposium on Microelectronics Technology and Devices (SBMicro)
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Author:

Teixeira Ricardo Cotrin¹,Flacker Alexander¹,Maiolini Giuliano¹,Cesar Rodrigo Reigota²,Miron Guilherme Cartagena³,Cordioli Julio Apolinario³

Affiliation:

1. Renato Archer Center for Information Technology,Assembly, Packaging and System Integration Division,Campinas,Brazil

2. State University of Campinas,Center for Semiconductor Components and Nanotechnologies,Campinas,Brazil

3. Federal University of Santa Catarina,Vibration and Acoustics Laboratory,Florianopolis,Brazil

Publisher

IEEE

Link

http://xplorestaging.ieee.org/ielx7/10302454/10302463/10302531.pdf?arnumber=10302531

Reference10 articles.

1. AZR Developer, 400K, and 421K Inorganic Developers;Technical Datasheet,0

2. Processing, Structure, Properties, and Applications of PZT Thin Films

3. Advanced Electronic Packaging

4. Design e encapsulamento de acelerometros piezoeletricos para dispositivos auditivos;miron;XII Congresso Iberoamericano de Acustica,2022

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