1. Institute of Microelectronics, Chinese Academy of Sciences; University of Chinese Academy of Sciences,Key Laboratory of Science and Technology on Silicon Devices, Chinese Academy of Sciences,Beijing,China,100029
2. Institute of Microelectronics, Chinese Academy of Sciences; Key Laboratory of Science and Technology on Silicon Devices, Chinese Academy of Sciences,Beijing,China,100029
3. Institute of Microelectronics, Chinese Academy of Sciences,Beijing,China,100029