Author:
Velichko O.I,Dobrushkin V.A,Muchynski A.N,Tsurko V.A,Zhuk V.A
Subject
Computer Science Applications,Physics and Astronomy (miscellaneous),Applied Mathematics,Computational Mathematics,Modelling and Simulation,Numerical Analysis
Reference23 articles.
1. Scaling transistors into the deep-submicron regime;Packan;MRS Bulletin/June 2000,2000
2. Enhanced diffusion in silicon processing;Cowern;MRS Bulletin/June 2000,2000
3. Ionenimplantation;Ryssel,1986
4. Low-temperature diffusivity of hydrogen in silicon substrates;Deng;Mat. Res. Soc. Symp. Proc.,1995
5. Physical model and numerical results of dissociation kinetics of hydrogen-passivated Si/SiO2 interface defects;Gadiyak;Thin Solid Films,1999
Cited by
5 articles.
订阅此论文施引文献
订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献