Laser Produced Plasma Light Sources. High Average Power Laser Produced Plasma EUV Light Sources.
Author:
Affiliation:
1. Extreme Ultraviolet Lithography System Development Association (EUVA)
Publisher
Japan Society of Plasma Science and Nuclear Fusion Research
Link
http://www.jstage.jst.go.jp/article/jspf/79/3/79_3_240/_pdf
Reference6 articles.
1. Cryogenic liquid-jet target for debris-free laser-plasma soft x-ray generation
2. Extreme ultraviolet emission from Xe clusters excited by high-intensity lasers
3. [3] H. Fiedorowicz, A. Bartnik, H. Daido, Il Woo Choi, M. Suzuki and S.Yamagami, Opt. Commun. 184, 161 (2000).
4. Optimization of EUV radiation yield from laser-produced plasma
5. A pump–probe investigation of laser-droplet plasma dynamics
Cited by 2 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Characterization of Pulsed High-Current Generator for Extreme Ultraviolet Generation;IEEJ Transactions on Fundamentals and Materials;2007
2. Pulsed High-Current Generator for EUV Source Development;IEEJ Transactions on Fundamentals and Materials;2005
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