Dechuck Operation of Coulomb Type and Johnsen-Rahbek Type of Electrostatic Chuck Used in Plasma Processing
Author:
Affiliation:
1. Department of Electrical Engineering and Computer Science, Nagoya University, Nagoya 464-8603, Japan
2. Department of Electronics and Information Engineering, Chubu University, Kasugai 487-8501, Japan
Publisher
Japan Society of Plasma Science and Nuclear Fusion Research
Subject
Condensed Matter Physics
Link
http://www.jstage.jst.go.jp/article/pfr/3/0/3_0_051/_pdf
Reference9 articles.
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4. [4] J. Field, Solid State Technol. 17, 91 (1994).
5. [5] L.D. Hartssough, Solid State Technol. 16, 87 (1993).
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