A New Trend of Plasma-Based Ion Implantation and Deposition
Author:
Affiliation:
1. Department of Electrical Engineering, Doshisha University
2. Surface Engineering Section, Materials Engineering Department, Southwest Research Institute
Publisher
Japan Society of Plasma Science and Nuclear Fusion Research
Link
https://www.jstage.jst.go.jp/article/jspf/80/4/80_4_281/_pdf
Reference36 articles.
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