Challenges and progress toward a 250 kV, 100 kW plasma ion implantation facility
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry
Reference28 articles.
1. Overview of plasma source ion implantation research at University of Wisconsin–Madison
2. Initial operation of a large-scale plasma source ion implantation experiment
3. Plasma ion implantation technology at Hughes Research Laboratories
4. Plasma ion implantation (PII) to improve the wear life of tungsten carbide drill bits used in printed wiring board (PWB) fabrication
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