Generation of Low Temperature Plasma at Atmospheric Pressure and its Application to Si Etching in Open Air
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Published:2002-01-01
Issue:4
Volume:39
Page:409-412
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ISSN:1229-7801
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Container-title:Journal of the Korean Ceramic Society
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language:en
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Short-container-title:Journal of the Korean Ceramic Society
Publisher
Korean Ceramic Society
Subject
Ceramics and Composites