Author:
Logan J. S.,Keller J. H.,Simmons R. G.
Cited by
29 articles.
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1. Chip Integration;Handbook of Semiconductor Interconnection Technology, Second Edition;2006-02-22
2. Methods/Principles of Deposition and Etching of Thin Films;Handbook of Semiconductor Interconnection Technology, Second Edition;2006-02-22
3. The effect of phase difference between powered electrodes on RF plasmas;Plasma Sources Science and Technology;2005-05-10
4. Helicon plasma with additional immersed antenna;Journal of Physics D: Applied Physics;2004-04-15
5. Generation of Low Temperature Plasma at Atmospheric Pressure and its Application to Si Etching in Open Air;Journal of the Korean Ceramic Society;2002-01-01