Stability of Sputtered Hf-Silicate Films in Poly Si/Hf-Silicate Gate Stack Under the Chemical Vapor Deposition of Poly Si and by Annealing
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Published:2004-09-01
Issue:9
Volume:41
Page:637-641
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ISSN:1229-7801
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Container-title:Journal of the Korean Ceramic Society
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language:en
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Short-container-title:Journal of the Korean Ceramic Society
Publisher
Korean Ceramic Society
Subject
Ceramics and Composites